Granted Patent
Utility
US 5,695,658 · App. 08/614,778
Non-photolithographic etch mask for submicron features
Inventor:
James J. Alwan
Patented Case
View Patent ↗
Granted: Dec 9, 1997
Filed: Mar 7, 1996
Inventor
James J. Alwan
Assignee (at issue)
Micron Display Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.