Granted Patent
Utility
US 5,703,488 · App. 08/481,285
Instrument for measuring plasma excited by high-frequency
Inventors:
Tadahiro Ohmi, Masaki Hirayama
Patented Case
View Patent ↗
Granted: Dec 30, 1997
Filed: Jul 5, 1995
Inventors
Tadahiro Ohmi
Masaki Hirayama
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.