Granted Patent
Utility
US 5,705,432 · App. 08/566,197
Process for providing clean lift-off of sputtered thin film layers
Inventors:
Kusol Lee, Tom Quach, Danny Li, Liping D. Hou, Sam Chung, Tom Chi
Patented Case
View Patent ↗
Granted: Jan 6, 1998
Filed: Dec 1, 1995
Inventors
Kusol Lee
Tom Quach
Danny Li
Liping D. Hou
Sam Chung
Tom Chi
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.