Granted Patent
Utility
US 5,707,765 · App. 08/654,459
Photolithography mask using serifs and method thereof
Inventor:
J. Fung Chen
Patented Case
View Patent ↗
Granted: Jan 13, 1998
Filed: May 28, 1996
Inventor
J. Fung Chen
Assignee (at issue)
MicroUnity Systems Engineering, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.