Granted Patent
Utility
US 5,712,193 · App. 08/367,377
Method of treating metal nitride films to reduce silicon migration therein
Inventors:
Glen Roy Hower, Daniel David Kostelnick, Yih-Cheng Shih
Patented Case
View Patent ↗
Granted: Jan 27, 1998
Filed: Dec 30, 1994
Inventors
Glen Roy Hower
Daniel David Kostelnick
Yih-Cheng Shih
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.