Granted Patent
Utility
US 5,712,198 · App. 08/568,997
Pre-thermal treatment cleaning process
Inventors:
Larry W. Shive, Saeed Pirooz
Patented Case
View Patent ↗
Granted: Jan 27, 1998
Filed: Dec 7, 1995
Inventors
Larry W. Shive
Saeed Pirooz
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.