Granted Patent
Utility
US 5,714,415 · App. 08/592,991
Method of forming thin semiconductor film
Inventor:
Shizuo Oguro
Patented Case
View Patent ↗
Granted: Feb 3, 1998
Filed: Jan 29, 1996
Inventor
Shizuo Oguro
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.