Granted Patent
Utility
US 5,717,198 · App. 08/499,819
Pellicle reflectivity monitoring system having means for compensating for portions of light reflected by the pellicle
Inventors:
Sergey V. Broude, Nicholas Allen, Abdu Boudour, Eric Chase, Carl Johnson, Pascal Miller, Jay Ormsby
Patented Case
View Patent ↗
Granted: Feb 10, 1998
Filed: Jul 10, 1995
Inventors
Sergey V. Broude
Nicholas Allen
Abdu Boudour
Eric Chase
Carl Johnson
Pascal Miller
Jay Ormsby
Assignee (at issue)
QC Optics, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.