Granted Patent
Utility
US 5,718,574 · App. 08/607,643
Heat treatment apparatus
Inventor:
Tomohisa Shimazu
Patented Case
View Patent ↗
Granted: Feb 17, 1998
Filed: Feb 27, 1996
Inventor
Tomohisa Shimazu
Assignee (at issue)
Tokyo Electron Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.