Granted Patent
Utility
US 5,724,122 · App. 08/448,994
Illumination system having spatially separate vertical and horizontal image planes for use in photolithography
Inventor:
Mark Oskotsky
Patented Case
View Patent ↗
Granted: Mar 3, 1998
Filed: May 24, 1995
Inventor
Mark Oskotsky
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.