Granted Patent
Utility
US 5,724,132 · App. 08/736,582
Extraneous substance inspection apparatus for patterned wafer
Inventors:
Yoshio Morishige, Hisato Nakamura, Tetsuya Watanabe
Patented Case
View Patent ↗
Granted: Mar 3, 1998
Filed: Oct 24, 1996
Inventors
Yoshio Morishige
Hisato Nakamura
Tetsuya Watanabe
Assignee (at issue)
Hitachi Electronics Engineering Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.