Granted Patent
Utility
US 5,731,125 · App. 08/597,561
Chemically amplified, radiation-sensitive resin composition
Inventors:
Mikio Yamachika, Masatoshi Kusama, Yasutaka Kobayashi, Akira Tsuji
Patented Case
View Patent ↗
Granted: Mar 24, 1998
Filed: Feb 2, 1996
Inventors
Mikio Yamachika
Masatoshi Kusama
Yasutaka Kobayashi
Akira Tsuji
Assignee (at issue)
Japan Synthetic Rubber Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.