Granted Patent
Utility
US 5,731,626 · App. 08/862,226
Process for controlling dopant diffusion in a semiconductor layer and semiconductor layer formed thereby
Inventors:
David Eaglesham, Hans-Joachim L. Gossmann, John M. Poate, Peter Stolk
Patented Case
View Patent ↗
Granted: Mar 24, 1998
Filed: May 23, 1997
Inventors
David Eaglesham
Hans-Joachim L. Gossmann
John M. Poate
Peter Stolk
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.