Granted Patent
Utility
US 5,738,915 · App. 08/716,043
Curing polymer layers on semiconductor substrates using variable frequency microwave energy
Inventors:
Zakaryae Fathi, Denise A. Tucker, Richard S. Garard, Jianghua Wei
Patented Case
View Patent ↗
Granted: Apr 14, 1998
Filed: Sep 19, 1996
Inventors
Zakaryae Fathi
Denise A. Tucker
Richard S. Garard
Jianghua Wei
Assignee (at issue)
Lambda Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.