IP Library › Granted Patent US 5,744,013
Granted Patent Utility
US 5,744,013 · App. 08/764,807

Anode basket for controlling plating thickness distribution

Inventors: Robert R. Botts, Swati V. Joshi, Louis W. Nicholls
Patented Case View Patent ↗
Granted: Apr 28, 1998 Filed: Dec 12, 1996
Inventors
Robert R. Botts
Swati V. Joshi
Louis W. Nicholls
Assignee (at issue)
Mitsubishi Semiconductor America, Inc.

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Quick Facts
Patent No.
US 5,744,013
App. No.
08/764,807
Filed
1996-12-12
Granted
1998-04-28
Kind
A