Granted Patent
Utility
US 5,756,234 · App. 08/663,826
High accuracy fabrication of X-ray masks with optical and E-beam lithography
Inventors:
Timothy R. Groves, Juan R. Maldonado
Patented Case
View Patent ↗
Granted: May 26, 1998
Filed: Jun 14, 1996
Inventors
Timothy R. Groves
Juan R. Maldonado
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.