Granted Patent
Utility
US 5,757,160 · App. 08/785,764
Moving interferometer wafer stage
Inventor:
Justin Kreuzer
Patented Case
View Patent ↗
Granted: May 26, 1998
Filed: Dec 23, 1996
Inventor
Justin Kreuzer
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.