Granted Patent
Utility
US 5,757,480 · App. 08/834,417
Method for laser alignment in mask repair
Inventor:
Tetsuya Shimanaka
Patented Case
View Patent ↗
Granted: May 26, 1998
Filed: Apr 16, 1997
Inventor
Tetsuya Shimanaka
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.