Granted Patent
Utility
US 5,759,281 · App. 08/885,711
CVD reactor for uniform heating with radiant heating filaments
Inventors:
Alexander I. Gurary, Scott Beherrell, Vadim Boguslavskiy
Patented Case
View Patent ↗
Granted: Jun 2, 1998
Filed: Jun 30, 1997
Inventors
Alexander I. Gurary
Scott Beherrell
Vadim Boguslavskiy
Assignee (at issue)
EMCORE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.