IP Library Granted Patent US 5,762,391
Granted Patent Utility
US 5,762,391 · App. 08/632,457

Gripper for disk-shaped articles

Inventor: Franz Sumnitsch
Patented Case View Patent ↗
Granted: Jun 9, 1998 Filed: Apr 19, 1996
Inventor
Franz Sumnitsch
Assignee (at issue)
Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Gesellschaft m.b.H.

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Quick Facts
Patent No.
US 5,762,391
App. No.
08/632,457
Filed
1996-04-19
Granted
1998-06-09
Kind
A