Granted Patent
Utility
US 5,767,001 · App. 08/545,650
Process for producing semiconductor components between which contact is made vertically
Inventors:
Emmerich Bertagnolli, Helmut Klose
Patented Case
View Patent ↗
Granted: Jun 16, 1998
Filed: Nov 3, 1995
Inventors
Emmerich Bertagnolli
Helmut Klose
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.