Granted Patent
Utility
US 5,767,523 · App. 08/838,549
Multiple detector alignment system for photolithography
Inventor:
Andrew W. McCullough
Patented Case
View Patent ↗
Granted: Jun 16, 1998
Filed: Apr 9, 1997
Inventor
Andrew W. McCullough
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.