Granted Patent
Utility
US 5,780,316 · App. 08/879,109
Linewidth control apparatus and method
Inventors:
Hongzong Chew, John David Cuthbert, Hamlet Herring, John Louis Ryan, Robert Ching-I Sun, Thomas Wolf, Daniel Mark Wroge
Patented Case
View Patent ↗
Granted: Jul 14, 1998
Filed: Jun 19, 1997
Inventors
Hongzong Chew
John David Cuthbert
Hamlet Herring
John Louis Ryan
Robert Ching-I Sun
Thomas Wolf
Daniel Mark Wroge
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.