Granted Patent
Utility
US 5,781,346 · App. 08/691,754
Magnification correction for small field scanning
Inventors:
Paul C. Allen, Ronald D. Voisin
Patented Case
View Patent ↗
Granted: Jul 14, 1998
Filed: Aug 2, 1996
Inventors
Paul C. Allen
Ronald D. Voisin
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.