Granted Patent
Utility
US 5,783,495 · App. 08/659,145
Method of wafer cleaning, and system and cleaning solution regarding same
Inventors:
Li Li, Donald L. Westmoreland, Richard C. Hawthorne, Kevin J. Torek
Patented Case
View Patent ↗
Granted: Jul 21, 1998
Filed: Jun 5, 1996
Inventors
Li Li
Donald L. Westmoreland
Richard C. Hawthorne
Kevin J. Torek
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.