Granted Patent
Utility
US 5,786,560 · App. 08/874,775
3-dimensional micromachining with femtosecond laser pulses
Inventors:
Abdelkrim Tatah, Akira Fukumoto
Patented Case
View Patent ↗
Granted: Jul 28, 1998
Filed: Jun 13, 1997
Inventors
Abdelkrim Tatah
Akira Fukumoto
Assignee (at issue)
Panasonic Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.