IP Library Granted Patent US 5,791,975
Granted Patent Utility
US 5,791,975 · App. 08/513,080

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Inventors: Joseph V. Cesna, Chris Karlsrud, Spencer Preston
Patented Case View Patent ↗
Granted: Aug 11, 1998 Filed: Aug 9, 1995
Inventors
Joseph V. Cesna
Chris Karlsrud
Spencer Preston
Assignee (at issue)
SPEEDFAM CO., LTD.

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Quick Facts
Patent No.
US 5,791,975
App. No.
08/513,080
Filed
1995-08-09
Granted
1998-08-11
Kind
A