Granted Patent
Utility
US 5,804,314 · App. 08/216,206
Silicon microstructures and process for their fabrication
Inventors:
Leslie A. Field, Phillip W. Barth
Patented Case
View Patent ↗
Granted: Sep 8, 1998
Filed: Mar 22, 1994
Inventors
Leslie A. Field
Phillip W. Barth
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.