Granted Patent
Utility
US 5,804,505 · App. 08/679,489
Method of producing semiconductor device having buried contact structure
Inventors:
Yoshiaki Yamada, Kiyonori Kajiyana
Patented Case
View Patent ↗
Granted: Sep 8, 1998
Filed: Jul 12, 1996
Inventors
Yoshiaki Yamada
Kiyonori Kajiyana
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.