Granted Patent
Utility
US 5,814,195 · App. 08/736,978
Sputtering system using cylindrical rotating magnetron electrically powered using alternating current
Inventors:
John Lehan, Henry Byorum, Russell J. Hill, J. Kirkwood H. Rough
Patented Case
View Patent ↗
Granted: Sep 29, 1998
Filed: Oct 25, 1996
Inventors
John Lehan
Henry Byorum
Russell J. Hill
J. Kirkwood H. Rough
Assignee (at issue)
The BOC Group Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.