IP Library › Granted Patent US 5,815,054
Granted Patent Utility
US 5,815,054 · App. 08/863,404

Surface micromachined acoustic wave piezoelectric crystal with electrodes on raised ridges and in spaces therebetween

Inventors: Bruce A. Vojak, Jiashi Yang, Jin Huang, John E. Mattson
Patented Case View Patent ↗
Granted: Sep 29, 1998 Filed: May 27, 1997
Inventors
Bruce A. Vojak
Jiashi Yang
Jin Huang
John E. Mattson
Assignee (at issue)
Motorola, Inc.

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Quick Facts
Patent No.
US 5,815,054
App. No.
08/863,404
Filed
1997-05-27
Granted
1998-09-29
Kind
A