Granted Patent
Utility
US 5,815,268 · App. 08/672,291
Lithographic lens wavefront and distortion tester
Inventor:
L. David LaFleur
Patented Case
View Patent ↗
Granted: Sep 29, 1998
Filed: Jun 28, 1996
Inventor
L. David LaFleur
Assignee (at issue)
Raytheon Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.