Granted Patent
Utility
US 5,815,310 · App. 08/571,081
High numerical aperture ring field optical reduction system
Inventor:
David M. Williamson
Patented Case
View Patent ↗
Granted: Sep 29, 1998
Filed: Dec 12, 1995
Inventor
David M. Williamson
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.