Granted Patent
Utility
US 5,816,274 · App. 08/843,632
Apparartus for cleaning semiconductor wafers
Inventors:
Ronald D. Bartram, Eugene R. Hollander
Patented Case
View Patent ↗
Granted: Oct 6, 1998
Filed: Apr 10, 1997
Inventors
Ronald D. Bartram
Eugene R. Hollander
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.