Granted Patent
Utility
US 5,821,596 · App. 08/822,839
Batch fabricated semiconductor micro-switch
Inventors:
Denny K. Miu, James R. W. Clymer, Paul A. Endter, Viktoria Temesvary, Tseng-Yang Hsu, Weilong Tang
Patented Case
View Patent ↗
Granted: Oct 13, 1998
Filed: Mar 24, 1997
Inventors
Denny K. Miu
James R. W. Clymer
Paul A. Endter
Viktoria Temesvary
Tseng-Yang Hsu
Weilong Tang
Assignee (at issue)
Integrated Micromachines, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.