Granted Patent
Utility
US 5,831,162 · App. 08/785,683
Silicon micromachined motion sensor and method of making
Inventors:
Douglas Ray Sparks, George JIANG, Dan W. Chilcott, Mark B. Kearney
Patented Case
View Patent ↗
Granted: Nov 3, 1998
Filed: Jan 21, 1997
Inventors
Douglas Ray Sparks
George JIANG
Dan W. Chilcott
Mark B. Kearney
Assignee (at issue)
DELCO ELECTRONICS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.