Granted Patent
Utility
US 5,831,446 · App. 08/679,138
Process monitor test chip and methodology
Inventors:
Jason Siucheong So, Tam Le, Milind Asnani
Patented Case
View Patent ↗
Granted: Nov 3, 1998
Filed: Jul 12, 1996
Inventors
Jason Siucheong So
Tam Le
Milind Asnani
Assignee (at issue)
STMICROELECTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.