Granted Patent
Utility
US 5,837,613 · App. 08/976,760
Enhanced planarization technique for an integrated circuit
Inventors:
Alex Kalnitsky, Yih-Shung Lin
Patented Case
View Patent ↗
Granted: Nov 17, 1998
Filed: Nov 24, 1997
Inventors
Alex Kalnitsky
Yih-Shung Lin
Assignee (at issue)
STMICROELECTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.