Granted Patent
Utility
US 5,840,597 · App. 08/789,515
Method of making a semiconductor device force and/or acceleration sensor
Inventor:
Siegbert Hartauer
Patented Case
View Patent ↗
Granted: Nov 24, 1998
Filed: Jan 27, 1997
Inventor
Siegbert Hartauer
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.