Granted Patent
Utility
US 5,840,821 · App. 08/545,736
Coating solution and method for preparing the coating solution, method for forming insulating films for semiconductor devices, and method for evaluating the coating solution
Inventors:
Tadashi Nakano, Makoto Shimura, Tomohiro Ohta
Patented Case
View Patent ↗
Granted: Nov 24, 1998
Filed: Nov 21, 1995
Inventors
Tadashi Nakano
Makoto Shimura
Tomohiro Ohta
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.