Granted Patent
Utility
US 5,843,228 · App. 08/825,637
Apparatus for preventing heater electrode meltdown in single crystal pulling apparatus
Inventors:
Masao Saitoh, Daisuke Wakabayashi, Takashi Atami, Hisashi Furuya
Patented Case
View Patent ↗
Granted: Dec 1, 1998
Filed: Apr 1, 1997
Inventors
Masao Saitoh
Daisuke Wakabayashi
Takashi Atami
Hisashi Furuya
Assignees (at issue)
Mitsubishi Materials Silicon Corp.
MITSUBISHI MATERIALS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.