Granted Patent
Utility
US 5,847,460 · App. 08/574,659
Submicron contacts and vias in an integrated circuit
Inventors:
Fu-Tai Liou, Mehdi Zamanian
Patented Case
View Patent ↗
Granted: Dec 8, 1998
Filed: Dec 19, 1995
Inventors
Fu-Tai Liou
Mehdi Zamanian
Assignee (at issue)
STMICROELECTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.