Granted Patent
Utility
US 5,851,140 · App. 08/800,941
Semiconductor wafer polishing apparatus with a flexible carrier plate
Inventors:
Chris Barns, Malek Charif, Kenneth D. Lefton, Fred E. Mitchel
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Feb 13, 1997
Inventors
Chris Barns
Malek Charif
Kenneth D. Lefton
Fred E. Mitchel
Assignee (at issue)
Integrated Process Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.