Granted Patent
Utility
US 5,851,294 · App. 08/928,747
Gas injection system for semiconductor processing
Inventors:
Lydia J. Young, Richard H. Matthiesen, Simon Selitser, Ron van Os
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Sep 12, 1997
Inventors
Lydia J. Young
Richard H. Matthiesen
Simon Selitser
Ron van Os
Assignee (at issue)
Watkins-Johnson Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.