Granted Patent
Utility
US 5,851,899 · App. 08/694,072
Gapfill and planarization process for shallow trench isolation
Inventor:
Peter Weigand
Patented Case
View Patent ↗
Granted: Dec 22, 1998
Filed: Aug 8, 1996
Inventor
Peter Weigand
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.