IP Library › Granted Patent US 5,854,112
Granted Patent Utility
US 5,854,112 · App. 08/563,882

Transistor isolation process

Inventors: Wolfgang Krautschneider, Werner M. Klingenstein
Patented Case View Patent ↗
Granted: Dec 29, 1998 Filed: Nov 21, 1995
Inventors
Wolfgang Krautschneider
Werner M. Klingenstein
Assignee (at issue)
Siemens Aktiengesellschaft

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Quick Facts
Patent No.
US 5,854,112
App. No.
08/563,882
Filed
1995-11-21
Granted
1998-12-29
Kind
A