Granted Patent
Utility
US 5,854,120 · App. 08/769,031
Semiconductor device manufacturing method
Inventors:
Yuichi Urano, Masato Nishizawa, Yoshiyuki Sakai, Naoki Ito, Shinichi Hashimoto
Patented Case
View Patent ↗
Granted: Dec 29, 1998
Filed: Dec 17, 1996
Inventors
Yuichi Urano
Masato Nishizawa
Yoshiyuki Sakai
Naoki Ito
Shinichi Hashimoto
Assignee (at issue)
FUJI ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.