Granted Patent
Utility
US 5,856,707 · App. 08/743,380
Vias and contact plugs with an aspect ratio lower than the aspect ratio of the structure in which they are formed
Inventor:
John C. Sardella
Patented Case
View Patent ↗
Granted: Jan 5, 1999
Filed: Nov 4, 1996
Inventor
John C. Sardella
Assignee (at issue)
STMICROELECTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.