IP Library › Granted Patent US 5,861,063
Granted Patent Utility
US 5,861,063 · App. 08/590,471

Plasma CVD device

Inventor: Kentaro Shou
Patented Case View Patent ↗
Granted: Jan 19, 1999 Filed: Jan 23, 1996
Inventor
Kentaro Shou

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Quick Facts
Patent No.
US 5,861,063
App. No.
08/590,471
Filed
1996-01-23
Granted
1999-01-19
Kind
A