Granted Patent
Utility
US 5,869,388 · App. 08/407,767
Method of gettering using doped SOG and a planarization technique
Inventors:
Tsiu C. Chan, Frank R. Bryant
Patented Case
View Patent ↗
Granted: Feb 9, 1999
Filed: Mar 21, 1995
Inventors
Tsiu C. Chan
Frank R. Bryant
Assignee (at issue)
STMICROELECTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.